The UST-5800 has been designed by the E. Fjeld Company as a direct replacement stage for the Hitachi S-4800 series Field Emission Scanning Electron Microscope (FE-SEMs).
The stage and drive electronics of the UST-5800 incorporate advanced technologies to enable high resolution imaging and smooth motion at high magnifications. Conventional designs utilize comparatively large step-sizes and non-optimal drive methods, that cause the SEM image to "jump" at very high magnifications and slow speeds. Many users resort to using the SEM's electronic "Beam" or "Image" shift, which may introduce problems such as beam distortion, image shift run-out (inability to further deflect the beam), and loss of sample addressibility (inability to determine exactly where the beam is striking the sample). The UST-5800 overcomes these limitations by allowing accurate positioning, smooth motion, and slow speeds at high magnifications, all without using image shift
The UST-5800 is beneficial in many applications, including
* Locating and imaging specific DRAM cells in the semiconductor industry
* Examining critical surfaces of medical devices for stress and fractures
* Imaging defects and contamination for X-ray analysis
Stage Limits of Motion
- X : 0 - 105 mm
- Y : 0 - 90 mm
- Z : 0 - 30 mm
- TILT : -5 to +90 Degrees
- ROTATION : 360 Degrees Continuous
Advanced Microsetepping Motor Drive
- Configured to drive the five axis UST-5800 stage
- Ultra smooth stage moion at high magnification
- Low EMI design prevents electron beam interference
Display and Joystick Features
Display
- Coordinate readout of all axes positions and status (referencing, in motion, etc)
- Indicates currently selected axes and speed ranges
- Thin film electro-luminescent display with 160 degree viewing angle
- Quarter VGA (320 x 240) display size
Jostick
- Complete five axis joystick control, drive 3 axes simultaneously
- Joystick-selectable variable speed ranges
- Convenient LOAD button returns stage to the sample exchange position
- 5 Pushbuttons - Reference, Load, Speed range up/down, Axes select
Stage Lock
- Set Once" stage lock features no motion limiting or settling time
- All axes are free to be driven while the lock is engaged
Coordinate Storage Software
Software package designed for storage and recall of axis coordinates. Allows several different modes of addressing, including absolute, offset absolute, and relative.
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