Ultra-High Precision Vertical Stage
| Model | KSAV1010-ZF | KSAV2030-ZF |
| Travel(mm) | 10 | 30 |
| Pitch(mm) | 1 | 1 |
| Table Dimension(mm) | 120x120 | 220x220 |
| Resolution(µmm) | 0.23 | 0.4 |
| Max Speed(mm/sec) | 6 | 6.5 |
| Repeatability(µm) | 5 | 5 |
| Top Flate Dimension(mm) | 120 x 120 | 22 x 220 |
| Load Capacity(kg) | 10 | 20 |
