High Precision Vertical stage
| Model | PSVA30-ZF | PSAV100-ZF |
| Table size(mm) | 238 x 238 | 238 x 238 |
| MIn Height(mm) | 238 | 308 |
| Travel(mm) | 30 | 100 |
| Pitch(mm) | 4 | 4 |
| Resolution(µm) | 0.24 | 0.24 |
| Load Capacity(kg) | 80 | 80 |
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Customer Center
